File:B-ad-semphotoofsu8.png
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Summary edit
| Description |
English: Cross-section SEM photo of SU-8 bonded wafers. |
| Date | |
| Source | M. Wiemer and C. Jia and M. Töpper and K. Hauck, Wafer Bonding with BCB and SU-8 for MEMS Packaging (2006) |
| Author | Uploaded by Enaswiki at en.wikipedia |
Licensing edit
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Germany license.
Attribution: Fraunhofer ENAS
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Upload date | User | Bytes | Dimensions | Comment
- 2011-03-30 11:20 (UTC) | Enaswiki | 815357 (bytes) | 2546×1995 | {{Information |Description = Cross-section SEM photo of SU-8 bonded wafers. |Source = M. Wiemer and C. Jia and M. Töpper and K. Hauck, Wafer Bonding with BCB and SU-8 for MEMS Packaging (2006) |Date = 11:17, 30 March 2011 (UTC) |
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| current | 12:24, 27 December 2011 | | 2,546 × 1,995 (796 KB) | SreeBot (talk | contribs) | (Original text) : {{Information |Description = Cross-section SEM photo of SU-8 bonded wafers. |Source = M. Wiemer and C. Jia and M. Töpper and K. Hauck, Wafer Bonding with BCB and SU-8 for MEMS Packaging (2006) |Date = 11:17, 30 M |
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