File:16 nm 2-bar EUV asymmetry.png
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| Description | A pair of horizontal bars targeted at 16 nm width and 16 nm spacing cannot be in focus simultaneously, in the 0.33 NA EUV system (top graph: dipole illumination, 6 deg central angle of incidence). The asymmetry needs to be compensated at least partially by a customized illumination (bottom graph). The difference of CDs leads to edge placement errors and is effectively a position shift of the central space. Ref.: Figures 1b and 2 from T. Last et al., Proc. SPIE 9985, 99850W (2016). |
| Date | |
| Source | Excel |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2016-12-17 06:06:19 | 638× 574× | Guiding light | curve labels renamed |
| 2016-12-17 06:02:47 | 638× 574× | Guiding light | Separated dipole and optimized illumination cases |
| 2016-12-17 05:20:53 | 637× 289× | Guiding light | Added two curves for optimized case |
| 2016-12-13 13:19:58 | 570× 288× | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:08, 23 January 2017 | | 638 × 574 (22 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 16:08, 23 January 2017 |  | 638 × 574 (21 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-12-17 06:02:47 by Guiding light | |
| 16:08, 23 January 2017 |  | 637 × 289 (14 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-12-17 05:20:53 by Guiding light | |
| 16:08, 23 January 2017 |  | 570 × 288 (11 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2016-12-13 13:19:58 by Guiding light | |
| 09:42, 23 January 2017 |  | 638 × 574 (22 KB) | FastilyClone (talk | contribs) | Transferred from en.wikipedia (MTC!) |
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