File:ALD cartoon Steps 1-4 Reactant A with three ligands no inert.jpg

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Captions

Captions

Schematic illustration of one reaction cycle of the atomic layer deposition (ALD) process

Summary

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Description
English: Schematic illustration of one reaction cycle of the atomic layer deposition (ALD) process. One reaction cycle consists of four steps. Step 1 is the reactive adsorption of Reactant A, Step 2 is a purge or evacuation step, Step 3 is the reactive adsorption of Reactant B, and Step 4 is a purge or evacuation step.
Date
Source Own work
Author Aristeidis Goulas, Riikka L. Puurunen, J. Ruud van Ommen

Schematic illustration of an ALD cycle, designed to present the growth of a fraction of a monolayer of the ALD-grown material, as opposed to the full-monolayer growth shown in most cartoon illustrations of ALD.

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w:en:Creative Commons
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Date/TimeThumbnailDimensionsUserComment
current18:59, 22 August 2020Thumbnail for version as of 18:59, 22 August 20204,472 × 22,362 (3.7 MB)Rlpuu (talk | contribs)Uploaded own work with UploadWizard

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