File:ALD cartoon Steps 1-4 Reactant A with three ligands no inert.jpg
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DescriptionALD cartoon Steps 1-4 Reactant A with three ligands no inert.jpg |
English: Schematic illustration of one reaction cycle of the atomic layer deposition (ALD) process. One reaction cycle consists of four steps. Step 1 is the reactive adsorption of Reactant A, Step 2 is a purge or evacuation step, Step 3 is the reactive adsorption of Reactant B, and Step 4 is a purge or evacuation step. |
Date | |
Source | Own work |
Author | Aristeidis Goulas, Riikka L. Puurunen, J. Ruud van Ommen |
Schematic illustration of an ALD cycle, designed to present the growth of a fraction of a monolayer of the ALD-grown material, as opposed to the full-monolayer growth shown in most cartoon illustrations of ALD.
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current | 18:59, 22 August 2020 | 4,472 × 22,362 (3.7 MB) | Rlpuu (talk | contribs) | Uploaded own work with UploadWizard |
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