File:Defocused image shift vs angle.png

Defocused_image_shift_vs_angle.png (667 × 331 pixels, file size: 11 KB, MIME type: image/png)

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Description Different illumination angles result in different image shifts vs. focus. This is affected by the EUV mask absorber. The red and blue images refer to illuminations from sources on opposites of the optical axis. The black images are their superpositions.refM. Burkhard et al., Proc. SPIE 10957, 1095710 (2019).</ref> At the best focus, the red and blue images are overlapped, resulting in the highest contrast superposed image (shown as a single black image). Left: the illumination angles further from the optical axis have a positive best focus. Right: the illumination angles closer to the optical axis have a negative best focus.
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Source Power Point drawing
Author Guiding light
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2019-05-01 05:52:05 667 × 331 Guiding light
2019-05-01 05:49:54 667 × 331 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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current15:58, 2 April 2020Thumbnail for version as of 15:58, 2 April 2020667 × 331 (11 KB)Hippymoose17 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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