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File:EUV 2D edge stochastic variability.png

EUV_2D_edge_stochastic_variability.png (564 × 274 pixels, file size: 272 KB, MIME type: image/png)

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Description
English: Contact shapes vary due to EUV photon shot noise even after smoothing by resist blur.[1]
Date
Source Own work
Author Guiding light

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Reference

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  1. ↑ Stochastic Origins of EUV Feature Edge Roughness.

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current04:40, 6 July 2021Thumbnail for version as of 04:40, 6 July 2021564 × 274 (272 KB)Guiding light (talk | contribs)Uploaded own work with UploadWizard

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