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File:EUV Assist Feature Impact.png

EUV_Assist_Feature_Impact.png (481 × 289 pixels, file size: 10 KB, MIME type: image/png)

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Description Left: EUV process window for 18 nm two-bar without assist features. Right: EUV process window for 18 nm two-bar with pitch of 38 nm. Ref.: W. Gillijns et al., Proc. SPIE 10143, 1014314 (2017).</ref>
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Source PowerPoint
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-05-27 01:49:54 481 × 289 Guiding light
2017-01-25 03:33:51 612 × 334 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current15:56, 2 April 2020Thumbnail for version as of 15:56, 2 April 2020481 × 289 (10 KB)Hippymoose17 (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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