File:EUV SMO Performance Across Pitch.png
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| Description |
English: EUV SMO performance across pitch, as indicated by NILS (normalized image log slope). The performance is maximized for 36 nm pitch but degrades as pitch increases toward 48 nm. Ref.: R-H. Kim et al., Proc. SPIE vol. 9776, 97761R (2016). |
| Date | |
| Source | Graphic editor |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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| Date/Time | Dimensions | User | Comment |
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| 2017-05-19 14:04:03 | 610 × 399 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
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| current | 16:29, 20 August 2019 | | 610 × 399 (158 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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