File:Illustration of some saturation-determining factors in ALD.png
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Summary
editDescriptionIllustration of some saturation-determining factors in ALD.png |
English: Illustration of different saturation-determining factors in ALD: (a) running out of reactive sites causes saturation; (b) steric hindrance causes saturation in ligand exchange reaction with one ||Z–a group, with reactive sites ||Z–a capable of ligand exchange remaining under the ligand shroud; and (c) combination of running out of reactive sites of type ||Z–a and steric hindrance, for a reactant able to react (i) via ligand exchange with one ||Z–a group and (ii) dissociative adsorption onto ||M–Z|| sites. |
Date | |
Source | Own work |
Author | Riikka L. Puurunen, J. Ruud van Ommen |
This image is an updated version of an earlier representation of factors identified to cause saturation of irreversible chemisorption, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 12; https://doi.org/10.1063/1.1940727.
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