File:LOCOS birds beak DE.svg

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Summary

DescriptionLOCOS birds beak DE.svg	English: Detail cross section at the edge of an isolation windows after a simple LOCOS process. The schematic shows partial growth of Silicon dioxide into the silicon substrate and distortion of the silicon nitrite mask because of volume increase under the mask. Deutsch: Schnitt an der Kante eines Isolationsfenster nach einem einfachen LOCOS-Prozess. Zusehen ist das teilweise Wachstum in das Silicium-Substrat und die Verbiegung der Siliciumnitritmaske durch die Volumenzunahme auch unter der Maske.
Date	21 January 2009
Source	Own work
Author	Cepheiden

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	Date/Time	Dimensions	User	Comment
current	14:04, 17 February 2011	485 × 326 (5 KB)	Cepheiden (talk \| contribs)	fix
	14:01, 17 February 2011	485 × 326 (5 KB)	Cepheiden (talk \| contribs)	typo; thicker nitride film
	09:47, 17 December 2009	485 × 326 (9 KB)	Cepheiden (talk \| contribs)	small fix
	07:51, 22 January 2009	485 × 326 (9 KB)	Cepheiden (talk \| contribs)	removed bitmap link
	22:02, 21 January 2009	485 × 400 (9 KB)	Cepheiden (talk \| contribs)	{{Information \|Description={{en\|1=Detail cross section at the edge of an isolation windows after a simple LOCOS process. The schematic shows partial growth of Silicon dioxide into the silicon substrate and distortion of the silicon nitrite mask because of