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File:Lift-off-Verfahren - Ein- und Zweischichtsystem.svg

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Deutsch: Varianten für Opferschichten beim Lift-off-Verfahren mit Zielmaterial (schwarze Bereiche). A) Einschichtsystem mit negativem Flankenwinkel, wie sie durch einen Fotolack mit Bildumkehrschritt erzeugt werden kann; B) Zweischichtsystem bei die untere Schicht nach der Strukturierung zurückgeätzt wurde, um einen stufigen Hinterschnitt zu erzielen.
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Date/TimeThumbnailDimensionsUserComment
current10:24, 26 March 2012Thumbnail for version as of 10:24, 26 March 2012344 × 322 (19 KB)Cepheiden (talk | contribs)fix
10:00, 26 March 2012Thumbnail for version as of 10:00, 26 March 2012344 × 322 (18 KB)Cepheiden (talk | contribs){{Information |Description ={{de|1=Varianten für Opferschichten beim Lift-off-Verfahren mit Zielmaterial (schwarze Bereiche). A. Einschichtsystem mit negativem Flankenwinkel, wie sie durch einen Fotolack mit Bildumkehrschritt erzeugt werden kann. B...

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