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Аргоновая плазма над поверхностью мозаичной мишени, состоящей из сегментов Cu и Cu-50%B (процесс описан в статье Ph. V. Kiryukhantsev-Korneev, P. A. Trukhanov, A. V. Bondarev, N. V. Shvyndina, and E. A. Levashov. Structure and Properties of Tribological Coatings in Cu–B System. The Physics of Metals and Metallography Vol. 115 No. 7 2014, pp. 716–722). English: Argon plasma above the surface of mosaic target from segments of Cu and Cu-50%B. Infromation about deposition of Cu-B films using mosaic targets is presented in Ph. V. Kiryukhantsev-Korneev, P. A. Trukhanov, A. V. Bondarev, N. V. Shvyndina, and E. A. Levashov. Structure and Properties of Tribological Coatings in Cu–B System. The Physics of Metals and Metallography Vol. 115 No. 7 2014, pp. 716–722
https://link.springer.com/article/10.1134/S0031918X14040085 |
Date | |
Source | Own work |
Author | PhVKK Кирюханцев-Корнеев Филипп Владимирович / Научно-учебный центр СВС / ДНК Наука НИТУ «МИСиС» http://science.misis.ru/ |
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