Wikimedia Commons

File:Photoelectron trajectories vs dose.png

Original file (1,003 × 224 pixels, file size: 21 KB, MIME type: image/png)

Captions

Captions

Add a one-line explanation of what this file represents

Summary

edit
Description
English: EUV photoelectron trajectories have more spread with a cumulative increase in dose, leading to a larger number of absorbed photons producing photoelectrons.[1][2]
Date
Source Own work
Author Guiding light

Licensing

edit
I, the copyright holder of this work, hereby publish it under the following license:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.

References

edit
  1. ↑ Demonstration of Dose-Driven Photoelectron Spread in EUV Resists
  2. ↑ M. Kotera et al., "Extreme Ultraviolet Lithography Simulation by Tracing Photoelectron Trajectories in Resist," Jpn. J. Appl. Phys. 47, 4944 (2008).

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current02:45, 9 May 2022Thumbnail for version as of 02:45, 9 May 20221,003 × 224 (21 KB)Guiding light (talk | contribs)aspect ratio of axes
13:49, 6 May 2022Thumbnail for version as of 13:49, 6 May 20221,189 × 231 (25 KB)Guiding light (talk | contribs)Uploaded own work with UploadWizard

You cannot overwrite this file.

There are no pages that use this file.

Metadata

This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.

Retrieved from "https://commons.wikimedia.org/w/index.php?title=File:Photoelectron_trajectories_vs_dose.png&oldid=654845330"