File:SADP then SATP.png
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Summary
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| Description |
English: SADP (single spacer) patterning followed by SATP (two successive spacers) patterning using one mask for sidewall profile modulation with no cuts. The approach may be extended to 3nm node (16 nm pitch). The gray features are the original mandrels. Ref.: Y. Chen et al., Proc. SPIE 8683, 86830Z (2013). |
| Date | |
| Source | PowerPoint drawing |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2016-02-28 08:25 | 1210×464× (21016 bytes) | Guiding light | added drawn features |
| 2016-02-27 20:43 | 1195×464× (18087 bytes) | Guiding light | previous picture incomplete |
| 2016-02-22 14:40 | 849×464× (14490 bytes) | Guiding light | |
| 2016-02-16 11:41 | 1195×464× (18093 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 12:57, 15 March 2016 | | 668 × 253 (8 KB) | Guiding light (talk | contribs) | updated drawing |
| 12:25, 15 March 2016 |  | 712 × 295 (8 KB) | Guiding light (talk | contribs) | Newer drawing | |
| 05:43, 13 March 2016 |  | 375 × 211 (4 KB) | Guiding light (talk | contribs) | small change | |
| 13:59, 12 March 2016 |  | 375 × 211 (4 KB) | Guiding light (talk | contribs) | corrected drawing | |
| 13:33, 12 March 2016 |  | 375 × 211 (1 KB) | Guiding light (talk | contribs) | updated picture | |
| 13:30, 12 March 2016 |  | 375 × 211 (4 KB) | Guiding light (talk | contribs) | updated picture | |
| 13:28, 12 March 2016 |  | 420 × 211 (4 KB) | Guiding light (talk | contribs) | updated picture | |
| 04:34, 12 March 2016 |  | 420 × 190 (4 KB) | Guiding light (talk | contribs) | updated drawing | |
| 11:06, 6 March 2016 |  | 610 × 379 (7 KB) | Guiding light (talk | contribs) | changed picture | |
| 03:53, 6 March 2016 |  | 610 × 379 (8 KB) | Guiding light (talk | contribs) | Slightly extended picture |
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