File:Schematic illustration of ALD growth modes.png

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Schematic illustration of various growth modes: two-dimensional growth, random deposition, and island growth.

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English: Schematic illustration of various growth modes: (a) two-dimensional growth, (b) random deposition, and (c) island growth.
Date
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Author Riikka L. Puurunen

This image is an updated version of an earlier schematic illustration with increasing number of reaction cycles n of selected growth modes possible in ALD, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 16; https://doi.org/10.1063/1.1940727

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