File:Schematic illustration of ALD growth modes.png
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editDescriptionSchematic illustration of ALD growth modes.png |
English: Schematic illustration of various growth modes: (a) two-dimensional growth, (b) random deposition, and (c) island growth. |
Date | |
Source | Own work |
Author | Riikka L. Puurunen |
This image is an updated version of an earlier schematic illustration with increasing number of reaction cycles n of selected growth modes possible in ALD, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 16; https://doi.org/10.1063/1.1940727
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current | 14:52, 18 December 2020 | 1,790 × 718 (47 KB) | Rlpuu (talk | contribs) | Uploaded own work with UploadWizard |
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Vertical resolution | 59.05 dpc |