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File:Schematic illustration of changes with time during three ALD reaction cycles.png

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Schematic illustration of changes with time during three ALD reaction cycles (white background: reaction step, grey background: purge/evacuation)

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English: Schematic illustration of changes with time during three ALD reaction cycles (white background: reaction step, grey background: purge/evacuation): (a) division of an ALD cycle in four steps, with surface terminations after Reactant A and Reactant B shown; (b) partial pressures of Reactant A, Reactant B and inert carrier gas; (c) surface coverage of chemisorbed species from Reactant A and B (after 1st reaction cycle, Step 1, theta_A + theta_B = 1); (d) mass adsorbed and change in mass adsorbed with time.
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Source Own work
Author Riikka L. Puurunen, J. Ruud van Ommen, Aristeidis Goulas

This image builds upon an earlier illustration of changes during ALD cycles, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 10; https://doi.org/10.1063/1.1940727. Jonna Piironen is thanked for help with drawing this image.

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current08:28, 18 December 2020Thumbnail for version as of 08:28, 18 December 20202,536 × 2,263 (329 KB)Rlpuu (talk | contribs)Uploaded own work with UploadWizard

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