Wikimedia Commons

File:Typical classes of reaction mechanisms in ALD.png

Original file ‎(1,775 × 1,311 pixels, file size: 194 KB, MIME type: image/png)

Captions

Captions

Illustration of three typical classes of surface reaction mechanisms in atomic layer deposition (ALD) for molecule ML_n (here: n = 3)

Summary

edit
Description
English: Illustration of three typical classes of surface reaction mechanisms considered in atomic layer deposition (ALD) for molecule MLn (here: n = 3): (a) ligand exchange reaction, where a gaseous reaction byproduct aL is released; (b) associative adsorption, where a bond is formed between a surface site and the molecule; and (c) dissociative adsorption, where all parts of the MLn molecule are bonded to the surface in a process where bonds are broken and made. Ligand exchange reaction and dissociative reaction can take place further between an adsorbed species and a neighbouring surface site (a.2, c.2).
Date
Source Own work
Author Riikka L. Puurunen

This image is an updated version of an earlier representation of chemisorption mechanisms identified for ALD, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 11; https://doi.org/10.1063/1.1940727.

Licensing

edit
I, the copyright holder of this work, hereby publish it under the following license:
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current10:48, 18 December 2020Thumbnail for version as of 10:48, 18 December 20201,775 × 1,311 (194 KB)Rlpuu (talk | contribs)Uploaded own work with UploadWizard

You cannot overwrite this file.

There are no pages that use this file.

Metadata

This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.

Retrieved from "https://commons.wikimedia.org/w/index.php?title=File:Typical_classes_of_reaction_mechanisms_in_ALD.png&oldid=519656447"