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File:Various dependencies for adsorption vs. time in ALD and other cases.png

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Various dependencies for amount adsorbed vs. time in atomic layer deposition (ALD) and other cases. Panel (a) represents ideal ALD based on saturating, irreversible reaction (chemisorption).

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Description
English: Illustration of various time-dependencies of the amount adsorbed vs. time in gas-solid reactions during reactant exposure (white background) and a following purge/evacuation (grey background): (a) saturating, irreversible reaction (chemisorption); (b) non-saturating continuous reaction; (c) a combination of saturating, irreversible reaction and a continuous reaction component; (d) fully reversible adsorption (either chemisorption or physisorption); (e) partly reversible chemisorption; (f) a combination of saturating, irreversible chemisorption and reversible physisorption; and (g) saturating, irreversible reaction where reactant feed is stopped before saturation occurs. Panel (a) corresponds to ideal atomic layer deposition (ALD).
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Author Riikka L. Puurunen, J. Ruud van Ommen

This image is an updated version of an earlier representation of of how the amount of material adsorbed can vary with time, which was published in a scientific review article: Puurunen, Journal of Applied Physics, volume 97, article number 121301 (year 2005), Figure 8; https://doi.org/10.1063/1.1940727. Jonna Piironen is thanked for help in drawing this image.

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